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Effect of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

Journal article published by SPIE examining how working gas pressure affects interlayer mixing in magnetron-deposited Mo/Si multilayers. Publication date provided as 2013-09-20.

Categories: science-and-space

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
3/10
Geographic reach
3/10
Global importance
2/10
Impact magnitude
1/10
Positivity
5/10
Urgency
1/10

Why it matters

It reports research on deposition behavior of Mo/Si multilayers relevant to materials-science studies.

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