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Effect of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers
Journal article published by SPIE examining how working gas pressure affects interlayer mixing in magnetron-deposited Mo/Si multilayers. Publication date provided as 2013-09-20.
Categories: science-and-space
Generated scores
Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.
- Confidence
- 3/10
- Geographic reach
- 3/10
- Global importance
- 2/10
- Impact magnitude
- 1/10
- Positivity
- 5/10
- Urgency
- 1/10
Why it matters
It reports research on deposition behavior of Mo/Si multilayers relevant to materials-science studies.

