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Extreme ultraviolet-embedded phase-shift mask

Journal article titled "Extreme ultraviolet-embedded phase-shift mask" published by SPIE-Intl Soc Optical Eng on 2011-07-01. The supplied source data include no event details or impacts beyond the publication metadata.

Categories: science-and-space, technology

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
2/10
Geographic reach
1/10
Global importance
1/10
Impact magnitude
1/10
Positivity
5/10
Urgency
1/10

Why it matters

The item documents a scholarly publication on extreme ultraviolet phase-shift masks but provides no operational or impact information in the supplied data.

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