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Extreme ultraviolet-embedded phase-shift mask
Journal article titled "Extreme ultraviolet-embedded phase-shift mask" published by SPIE-Intl Soc Optical Eng on 2011-07-01. The supplied source data include no event details or impacts beyond the publication metadata.
Categories: science-and-space, technology
Generated scores
Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.
- Confidence
- 2/10
- Geographic reach
- 1/10
- Global importance
- 1/10
- Impact magnitude
- 1/10
- Positivity
- 5/10
- Urgency
- 1/10
Why it matters
The item documents a scholarly publication on extreme ultraviolet phase-shift masks but provides no operational or impact information in the supplied data.

