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Fabrication of large-sag aspheric micro-optics with nanometer accuracy using electron-beam lithography on curved substrates
A journal article describing a method to fabricate large-sag aspheric micro-optics on curved substrates with nanometer accuracy using electron-beam lithography. Published by SPIE with publication date 2006-04-01; the supplied excerpt only listed publisher and content type and provided no further details.
Categories: science-and-space, technology
Generated scores
Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.
- Confidence
- 4/10
- Geographic reach
- 1/10
- Global importance
- 2/10
- Impact magnitude
- 2/10
- Positivity
- 7/10
- Urgency
- 1/10
Why it matters
The article presents a precision fabrication technique for micro-optics using electron-beam lithography on curved substrates.

