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Fabrication of large-sag aspheric micro-optics with nanometer accuracy using electron-beam lithography on curved substrates

A journal article describing a method to fabricate large-sag aspheric micro-optics on curved substrates with nanometer accuracy using electron-beam lithography. Published by SPIE with publication date 2006-04-01; the supplied excerpt only listed publisher and content type and provided no further details.

Categories: science-and-space, technology

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
4/10
Geographic reach
1/10
Global importance
2/10
Impact magnitude
2/10
Positivity
7/10
Urgency
1/10

Why it matters

The article presents a precision fabrication technique for micro-optics using electron-beam lithography on curved substrates.

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