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Investigation of direct milling of micro-optical elements with continuous relief on a substrate by focused ion beam technology

Journal article reporting an investigation of direct milling of micro-optical elements with continuous relief on a substrate using focused ion beam technology. Publisher metadata lists SPIE - International Society for Optical Engineering.

Categories: science-and-space, technology

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
6/10
Geographic reach
1/10
Global importance
3/10
Impact magnitude
3/10
Positivity
6/10
Urgency
1/10

Why it matters

The article documents research on a microfabrication technique for producing micro-optical elements.

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