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Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes

A SPIE journal article published 2011-07-01 reports research on optical encoding and phase control for an electrostatically driven two-dimensional MOEMS scanner operating at two resonant modes. The source excerpt provided no further technical or impact details.

Categories: science-and-space, technology

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
3/10
Geographic reach
1/10
Global importance
2/10
Impact magnitude
2/10
Positivity
6/10
Urgency
1/10

Why it matters

This journal article documents a technical research contribution related to MOEMS scanners.

Sources

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