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Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography

Journal article titled "Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography" published by SPIE on 2011-07-01. The supplied excerpt contains only publisher and content-type information and provides no further event details.

Categories: science-and-space, technology

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
2/10
Geographic reach
1/10
Global importance
2/10
Impact magnitude
2/10
Positivity
6/10
Urgency
1/10

Why it matters

The article documents a technical study relevant to lithography research.

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