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Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography
Journal article titled "Solid-immersion Lloyd's mirror as a testbed for plasmon-enhanced ultrahigh numerical aperture lithography" published by SPIE on 2011-07-01. The supplied excerpt contains only publisher and content-type information and provides no further event details.
Categories: science-and-space, technology
Generated scores
Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.
- Confidence
- 2/10
- Geographic reach
- 1/10
- Global importance
- 2/10
- Impact magnitude
- 2/10
- Positivity
- 6/10
- Urgency
- 1/10
Why it matters
The article documents a technical study relevant to lithography research.

