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Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Journal article published by SPIE-Intl Soc Optical Eng on 2014-12-02 about methods to improve overlay accuracy using device-correlated metrology targets. The source provided no further event or impact details.

Categories: technology, science-and-space

Generated scores

Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.

Confidence
4/10
Geographic reach
1/10
Global importance
2/10
Impact magnitude
2/10
Positivity
7/10
Urgency
1/10

Why it matters

The article reports techniques intended to improve overlay measurement accuracy.

Sources

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