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Techniques for improving overlay accuracy by using device correlated metrology targets as reference
Journal article published by SPIE-Intl Soc Optical Eng on 2014-12-02 about methods to improve overlay accuracy using device-correlated metrology targets. The source provided no further event or impact details.
Categories: technology, science-and-space
Generated scores
Scores are based on the cited reporting and use a 1–10 scale. Read the methodology.
- Confidence
- 4/10
- Geographic reach
- 1/10
- Global importance
- 2/10
- Impact magnitude
- 2/10
- Positivity
- 7/10
- Urgency
- 1/10
Why it matters
The article reports techniques intended to improve overlay measurement accuracy.

